Thermal behavior simulation of bulk acoustic wave resonator

摘要

In order to predict the thermal behavior of bulk acoustic wave resonator (BAWR) and evaluate the power handling capacity, a BAWR thermal behavior simulation method is proposed. The conductor surface loss in the BAWR electromagnetic model is extracted and used as the heat source for thermal simulation to obtain the temperature distribution of the resonator. Then the signal feeding edge, active area shape and power handling capacity are researched. The simulation results show that in order to moderate the self-heating effect of BAWR, the signal feeding should follow the principle of "feeding in from long edge, feeding out from long edge"; active area shape has little to do with self-heating effect; the power handling capacity of the designed BAWR can reach to 3 W.