Lab-level and low-cost fabrication technique for polymer based micro-optical elements and holographic structures

摘要

Polymer based diffractive optical elements have gained increasing interest due to their potential to be used in various applications such as illumination technology, micro optics and holography. We present a novel production process to fabricate polymer based diffractive optical elements and holograms. The process is based on maskless lithography, which is used to fabricate optical elements in photoresist. We discuss several lab-made lithography setups based on digital mirror devices and liquid crystal devices with respect to light efficiency, resolution and contrast. The whole optical setup is designed with an emphasis on low-cost setups, which can be easily implemented in an optical research lab. In a subsequent step, a copy of the microstructures is easily replicated into optical polymeric materials by means of a soft stamp hot embossing process step. The soft stamp is made from Polydimethylsiloxan, which is coated onto the microstructure in resist. The hot embossing process is carried out by a self-made and low-cost hot embossing machine. We present confocal topography measurements to quantify the replication accuracy of the process and demonstrate diffractive optical elements and holographic structures, which were fabricated using the process presented.