NovaTubeTM: a breakthrough toward sealed-off excimer lasers

摘要

Abstract: NovaTube$+TM$/ is the result of many years of extensive material research at Lambda Physik to develop a laser cavity of quasi sealed-off laser performance. As test data demonstrate the operating costs can be cut 10 times using the new tube. Test runs in the laboratory have culminated in 10$+9$/ shots operation on a single gas fill achieved with a 50 W KrF laser. !0