High-resolution AC thin-film electroluminescence using active matrix on Si substrate

摘要

Abstract: Active matrix electroluminescent (AMEL) devices arefabricated using circuitry built on the thin-filmsingle crystal silicon on insulator wafers. A 128 $MUL128 matrix with 24$mu@m pixel pitch (1000 lines/inch)is fabricated with higher than 80% fill factor showinginitial brightness of above 500fL and high contrastratios ($GRT@100:1). These devices demonstrated thesuccessful combination of active circuitry fabricatedusing conventional IC processing with standardelectroluminescent processing. This AMEL approachprovides the potential for head-mounted displays with avery small profile and high efficiency. !5