IN-SITU MANIPULATION OF CARBON NANOTUBES INSIDE FIELD EMISSION-SCANNING ELECTRON MICROSCOPE

摘要

We demonstrate the manipulation of nanostructured materials inside field-emission scanning-electron microscope (FE-SEM). For the manipulation inside FE-SEM, two nanomanipulators traveling about 20 mm with a minimum increment of 1 nm can are used. Both render the motion in x, y, and z directions, providing various manipulation freedoms such as moving, bending, cutting, and biasing. In addition, we carried out in situ characterizations of electron beam-induced junction between the W tip and carbon nanotubes together with the fabrication of a carbon-nanotube transistor on pre-patterned metal electrodes and a cross-junction of nanotubes will be also demonstrated.