Dissolution of indium arsenide in HNO3-HBr-H2O and Br2-HBr solutions

摘要

Abstract: The InAs dissolution in HNO$-3$/-HBr-H$-2$/O and Br$-2$/-HBr solutions is investigated. The surface of equal etching rates is constructed and the process limiting stages of dissolution depending on a size of a ratio in such solutions are determined. The kinetics of InAs dissolution in Br$-2$/- HBr solutions is investigated. The solution region which can be used for chemicodynamic polishing of InAs is determined. !9