Reflective infrared spectra of PECVD thin films on glass substrate

摘要

In order to use a reflective FTIR measurement to evaluate thinfilms deposited on glass substrate, we have to consider several improtant factors, such as surfce polarization, phase shift, and interference from different interfaces. PECVD thinfilms, oxide, nitride and a-Si:H deposited on top of the glass substrate are discussed by the reflective FTIR meeasurement.