Using area CCD to detect the optical signal in autocollimation

摘要

When autocollimation is performed, the measurement of the reflected optical signal is an active measurement. Considering this signal is an active measurement. Considering this feature, the theoretical analysis is made in this paper, and the result provides an important scientific basis for improving the accuracy of the measurement system to a great extent. According to the result, an autocollimator is designed, and a good measurement accuracy is achieved.