Dynamic Modeling and Position Error Analysis of XYθ H Type Stage

摘要

The position errors in the precision stage have increased as the specimens size increased. The yaw error of the position error caused by synchronous error between tandem motors is dominant error in the H type stage. The rotatable stage with flexure joint mechanism can be thought to compensate the yaw error. This paper dedicated to determine dynamic model of rotatable stage. The position errors of the H type stage was analysed by HTM(Homogeneous Transformation Matrix).