Single-shot, long-range, and zoomable optical tomography and profilometry using a diffraction grating and a CCD camera

摘要

We have developed a novel single-shot optical tomography and profilometry that is able to measure the tomograms and surface profiles of a sample in realtime with long measurable range. The system comprises of an optical frequency comb interferometry and a diffraction grating. The grating plays as a spatial phase modulator (SPM), so that the realtime interference images can be achieved by a CCD camera. Owing to the diffraction lights by the SPM, the axial zooming operation of the proposed system can be realized. The zooming range of the proposed system depends on how many diffraction orders are generated by the SPM. Measurements of a reference Gauge-block step-height sample at different diffraction orders are performed to evaluate the proposed system.