Development of a Ultra-Fast Confocal Scanner for High Quality SD-lnspection

摘要

For 50 years, confocal technology has been known as the most accurate means of microscopy. However, it was too slow to capture 3D images and could therefore not be utilized for in-process or final inspection steps in electronic or micro mechanic manufacturing. Now, Siemens Dematic AG has developed and patented the SISCAN sensor, a high speed confocal line camera which incorporates the accuracy of the confocal technology with higher scanning speeds. This outstanding innovation utilizes a unique method of fast focusing at a perpendicular angle to the measured object. High-speed capturing of images now enable the SISCAN for use for in-process inspection of micro electronic and micro mechanic components with micron-level accuracy. Challenges of speed, precision, reliability and cost effectiveness of high-speed, high-accuracy measurement are now overcome.