Investigations on Effects of External Parameters and Inherent Properties on the Natural Response of Piezoelectric Actuators dedicated to Ultra Positioning

摘要

In spite of the known inherent non-linear characteristics of piezoelectric material, the ability to produce desired responses with high accuracy at low electric field is affected by a number of parameters such as frequencies of the driving voltage. In this paper, hard and soft piezoelectric material types have been investigated and their natural response to specific positioning tasks analysed before any implementation of controllers to observe the effects of various parameters on precision positioning. The blocking forces were investigated, as they are part of the actuation characteristics. The blocking forces do not seem to depend on the class of the materials, but on the stiffness of the material itself. The different loading mechanisms have a serious influence on the hysteresis. Once the natural behaviour of the piezoelectric material is understood, it will be very easy to implement a suitable controller for ultra high positioning with compensation for the errors due to inherent characteristics.