Maaterial Removal Mechanisms in Abrasive Polishing of Structured Surfaces

摘要

Abrasive polishing using pin type and wheel type polymer polishing tools is well suited for the finishing of structured surfaces. Surface roughness and form accuracy of diamond machined and precision ground steel and electroless nickel plated structured molds can be improved using this newly developed polishing process. The experiments showed that smaller relative velocities and shorter polishing times lead to decreased surface roughness values. Furthermore, different kinds of surface micro-topographies were generated by abrasive polishing depending on the polishing pressure and relative velocity. This paper reports on achievable surface quality and material removal mechanisms in abrasive polishing of structured surfaces. Wear volumes and material removal rates determined by performing analog micro-scale abrasion tests are presented. Objective of this paper is to show the potential of this new polishing process and to come to a better understanding of the material removal mechanisms in abrasive polishing of structures which is a stringent requirement for the development of a deterministic and robust polishing process.