Microsystems education without using the clean-room environment : Study of an accelerometer realized using printed circuit technology

摘要

Working on a capacitive accelerometer allows students to learn about microsystems with a very simple technology. Starting from the specifications of the sensor, which have previously been computed (different for each group), students calculate its dimensions. When it is addembled, measurements are done in several conditions (dontinued accelerations and pulse excitation...). Specific electronic circuits are developed to get different oscillograms (JFET charge amplifier, variable frequency oscillator, controlled gain amplifier). From theses experimental results we can get the values of parameters in the theoretical model. Different kinds of measurements allow cross checking to tesk the coherence of the results.