Scanning thermochemical lithography of a conjugated polymer and the role of the thermal conductivity of the substrate

摘要

We show the use of a heated atomic force microscope (AFM) probe to pattern the conjugated polymer poly(p-phenylene vinylene) (PPV) from its precursor with resolution <28nm. We demonstrate such resolutions on high thermal conductivity substrates and discuss the advantages of a thermochemical approach to lithography.