首页> 外文会议>European Microwave Conference vol.1; 20041011-14; Amsterdam(NL) >An Original Methodology to Assess Fatigue Behavior in RF MEMS Devices
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An Original Methodology to Assess Fatigue Behavior in RF MEMS Devices

机译:评估RF MEMS器件疲劳行为的原始方法

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摘要

The analysis of fatigue behavior for polycrystalline gold microbridges is the aim of this paper. A description of the fatigue phenomenon for these elementary structures is presented. It is obtained by combining elementary in situ test benches of varying dimensions and cyclic actuation; in the same way, the debugging-time is determined according to the design. Test benches have been developed allowing performing bending fatigue tests of polycrystalline gold structural layers, describing the fatigue phenomenon and obtaining a constant debugging-time, whatever the excitation frequency and the beams length.
机译:本文旨在分析多晶金微桥的疲劳行为。介绍了这些基本结构的疲劳现象。它是通过组合各种尺寸的基本原位测试台和循环驱动而获得的;同样,调试时间是根据设计确定的。已经开发了测试台,可以执行多晶金结构层的弯曲疲劳测试,描述疲劳现象并获得恒定的调试时间,而与激发频率和光束长度无关。

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