Lateral Field Excitation (LFE) of Thickness Shear Mode (TSM) Acoustic Waves in Thin Film Bulk Acoustic Resonators (FBAR) as a Potential Biosensor

机译：薄膜体声谐振器（FBAR）中厚度剪切模式（TSM）声波的横向场激励（LIFE）作为潜在的生物传感器

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Lateral field excitation (LFE) of a thin film bulk acoustic resonator (FBAR) is an ideal platform for biomedical sensors. A thickness shear mode (TSM) acoustic wave in a piezoelectric thin film is desirable for probing liquid samples because of the poor c

机译：薄膜体声波谐振器（FBAR）的横向场激励（LFE）是生物医学传感器的理想平台。压电薄膜中的厚度剪切模式（TSM）声波对于探测液体样品是理想的，因为它的C差

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《Engineering in Medicine and Biology Society, 2006 Annual International Conference of the IEEE》|2006年|P.4590-4593|共4页
会议地点 New York,NY
作者
Dickherber; Anthony; Corso; Christopher D.; Hunt; William;
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1. AlN-based sputter-deposited shear mode thin film bulk acoustic resonator (FBAR) for biosensor applications - A review [J] . Wingqvist G. Surface & Coatings Technology . 2010,第5期

机译：基于AlN的溅射沉积剪切模式薄膜体声谐振器（FBAR）在生物传感器中的应用-综述
2. A solidly mounted, high frequency, thickness shear mode bulk acoustic wave resonator using X-LiTaO_3 thin plate and SiO_2/Ta multilayer acoustic films [J] . Kadota Michio, Ishii Yoshimi, Tanaka Shuji Japanese journal of applied physics . 2021,第SD期

机译：使用X-LIAO_3薄板和SiO_2 / TA多层声膜的稳固安装的高频，厚度剪切模式散装声波谐振器
3. The High Q Factor Lateral Field?￠????Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid [J] . Peng Wang, Shuren Song, Jingjing Wang, Micromachines . 2016,第12期

机译：高Q因子横向场-在液体中工作的激发厚度剪切模式薄膜体声谐振器
4. Lateral Field Excitation (LFE) of Thickness Shear Mode (TSM) Acoustic Waves in Thin Film Bulk Acoustic Resonators (FBAR) as a Potential Biosensor [C] . Anthony Dickherber, Christopher D. Corso, William Hunt . 2006

机译：薄膜体声谐振器（FBAR）中厚度剪切模式（TSM）声波的横向场激励（LIFE）作为潜在的生物传感器
5. Design, modeling and fabrication of shear mode bulk acoustic wave sensor as a potential biosensor [D] . Cheng, Chi-Jung. 2012

机译：剪切模式体声波传感器作为潜在生物传感器的设计，建模和制造
6. The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid [O] . Da Chen, Wenwen Ren, Shuren Song, 2016

机译：在液体中工作的高Q因子横向场激励厚度剪切模式薄膜体声谐振器
7. The High Q Factor Lateral Field–Excited Thickness Shear Mode Film Bulk Acoustic Resonator Working in Liquid [O] . Da Chen, Wenwen Ren, Shuren Song, 2016

机译：高Q因子横向场激励厚度剪切模式薄膜声学谐振器在液体中工作

Lateral Field Excitation (LFE) of Thickness Shear Mode (TSM) Acoustic Waves in Thin Film Bulk Acoustic Resonators (FBAR) as a Potential Biosensor

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