Debris-free low-cost commercial EUV source for at-wavelength metrology

摘要

A commercial extreme ultraviolet (EUV) source for at-wavelength metrology is developed. The source concept is based on the transfer of advanced microfocus x-ray tube technology into the EUV spectral range. This concept allows the realization of a compact, debris-free, and long-term stable EUV source. In the EUV tube, silicon targets are used to generate radiation at 13.5 nm. Detailed characteristics of the source performance are reported and different applications of the source in the field of at-wavelength metrology are presented.