GROWTH OF NANO-STRUCTURED TiO_2-DOPED LiCoO_2 PLD FILMS AND THEIR ELECTROCHEMICAL PROPERTIES

摘要

Ti-doped LiCoO_2 thin films were grown by pulsed laser deposition technique on various substrates. Films deposited in p(O_2)=200 mTorr showed good crystallinity when deposited onto silicon substrate maintained at Ts=700℃. It was found that such a film crystallizes in the layered structure (R3m S.G.) with the preferred (003) orientation. The effect of doping was evidenced by enhancement of the electrical conductivity and electrochemical behavior vs. Li/Li~+.