FFT Impedance Spectroscopy Analysis Of The Growth Of Anodic Oxides On Si With Various Electrolytes

摘要

The growth of anodic oxides on (100) p-Si has been analyzed with FFT impedance spectroscopy (FFTIS) in a comparative study for several "organic electrolytes", as well as H_2O. Measurement results strongly support the model of anodic oxide growth contained in the Current-Burst-Model (CBM), developed earlier in the context of current / voltage oscillations. Based on this model the mechanisms of the anodic oxidation were studied in detail not only qualitatively, but also quantitatively. FFTIS allows, e.g., the in-situ monitoring of the oxide layer thickness or the oxide coverage. The analyzed oxides could be grouped into essentially two different classes according to their structure as measured by atomic force microscopy, in good agreement with predictions from the FFTIS results.