THE ROADMAP PROCESS: THE ITRS AND FUTURE SEMICONDUCTOR FACTORY CHALLENGES

摘要

The research agenda for the semiconductor industry begins with the preparation of thernInternational Technology Roadmap for Semiconductors. The process and protocol for preparing thisrndocument along with some examples to demonstrate this will be examined with some emphasis onrncontamination control as a significant component of the defect reduction chapter as well as factoryrnintegration, which is how the factory delivers on the promise of the technology. The means ofrnimplementing the requirements listed in the roadmap will also be presented along with some details onrnthe Semiconductor Research Corporation, a consortium dedicated to supporting the university researchrnthat supports the ITRS.