EVALUATING THE EFFECTIVENESS OF AMC CONTROL STRATEGIES WITH REACTIVITY MONITORING

摘要

The control of airborne molecular contaminants (AMC) is becoming a design requirement for allrnsemiconductor manufacturing facilities. Chemical filtration in many forms is being employed inrnmakeup air handling units, recirculation air handlers, minienvironments, fan filter units, and processrntools. Suppliers of chemical filtration systems are being asked how best to determine if their systems arernworking and, if so, whether they are meeting design requirements.rnJust as there are many ways to apply chemical filtration for the control of AMC, there are manyrndifferent methods being used to measure AMC and to evaluate filter system performance. Employed inrneither real-time or passive form, reactivity monitoring has been used in a number of fabs for severalrnyears as a way to gauge AMC levels and to evaluate the effectiveness of AMC control strategies.rnWhether controlling AMC directly or indirectly, reactivity monitoring can provide an overall indicationrnof ambient air quality as well as AMC levels within the controlled spaces.rnThis paper will focus on the use of reactivity monitoring as an air monitoring technique. Resultsrnof reactivity monitoring from semiconductor manufacturing facilities will be presented illustrating bothrnthe validity of this air monitoring technique in general as well as its ability to gauge the effectiveness ofrnchemical filtration when applied for the control of AMC.