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Digital Fabrication of - Oxide Electronics

机译:氧化物电子的数字化制造

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摘要

The ink-jet printing technology is one of the most promising alternatives to photolithographic and masking technology allowing additive patterning of functional materials such as conductors, insulators, and semiconductors on a substrate. This approach enables the fabrication of cost-effective electronics. In particular, printable amorphous oxides have some advantages compared to other solution processable organic materials like atmospheric and temperature stability and relatively high field-effect mobility, which make them competitive candidates to be integrated in functional devices and smart systems.rnHere we report on the fabrication of basic electronic building blocks (e.g. a diode, resistor, capacitor) based on ink-jet printed amorphous oxides and metal contacts as active and passive device layers. Printed components are based on originally synthesized amorphous semiconductive oxides and metallic inks. After printing, low temperature sintering method developed by NovaCentrix(PulseForge) was performed in order to form the device active and passive layers. This was accomplished by using proprietary high-intensity flash lamps at very short pulse durations allowing us to use a low-cost Polyethylene terephthalate (PET) plastic film as the substrate material.rnObtained results may open novel routes for the development of a next generation of Large Area Printed Electronics based on printed amorphous oxides.
机译:喷墨印刷技术是光刻和掩膜技术最有前途的替代方法之一,可以在基材上对功能材料(例如导体,绝缘体和半导体)进行附加图案化。这种方法使制造具有成本效益的电子产品成为可能。特别是,与其他可溶液处理的有机材料相比,可印刷的无定形氧化物具有一些优势,例如大气和温度稳定性以及相对较高的场效应迁移率,这使其成为在功能器件和智能系统中集成的有竞争力的候选材料。基于喷墨印刷的非晶氧化物和金属触点作为有源和无源器件层的基本电子构件(例如,二极管,电阻器,电容器)。印刷组件基于最初合成的非晶半导体氧化物和金属油墨。打印后,执行NovaCentrix(PulseForge)开发的低温烧结方法,以形成器件的有源层和无源层。这是通过在非常短的脉冲时间内使用专有的高强度闪光灯来实现的,从而使我们能够使用低成本的聚对苯二甲酸乙二酯(PET)塑料薄膜作为基材。基于印刷无定形氧化物的大面积印刷电子产品。

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