Department of Materials Science and Engineering, University of Texas at Dallas, Richardson, Texas 75080, USA;
Department of Materials Science and Engineering, University of Texas at Dallas, Richardson, Texas 75080, USA;
Department of Materials Science and Engineering, University of Texas at Dallas, Richardson, Texas 75080, USA;
Department of Advanced Materials Engineering, Hanyang University, AnSan, Korea;
机译:通过在锗上沉积原子层沉积的ZrO_2 / La_2O_3电介质的后沉积退火来稳定非常高k的ZrO_2相
机译:ZrO_2 / La_2O_3高k电介质在锗上的原子层沉积达到0.5 nm等效氧化物厚度
机译:具有原子层沉积(ALD)HfAlO高k电介质的AlGaN / GaN功率器件的高温器件传输性能和关态特性的改善
机译:高k电介质的ALD(原子层沉积)原位XPS研究:La_2O_3使用La-Findidinate和臭氧
机译:使用基于臭氧的ALD(原子层沉积)的高K电介质沉积(氧化铝),用于石墨烯基器件。
机译:四(二甲基氨基)锆和臭氧原子层沉积生长的高k ZrO2薄膜的结构和介电性能
机译:高k介电原子层沉积之前In0.53Ga0.47As的Ga2O钝化的原位表征