Long linear MWIR and LWIR HgCdTe infrared detection arrays for high-resolution imaging

摘要

Abstract: High resolution infrared imaging system calls for very long scanning arrays with several thousands of detectors and high performance. This paper presents the recent technological developments an the electrooptical performances obtained at LETA/LIR on 1500 detector linear HgCdTe arrays working in the 3-5 and 8-10 $mu@m spectral ranges. These very large arrays have an indirect hybrid architecture composed of butted HgCdTe PV detection circuits and Si CMOS readouts hybridized on a fanout substrate. Defect free dicing and butting, respecting the detector pitch, is made by accurate and non damaging techniques. !5