Systematic parameter calibration in the wavefront testing with reverse Hartmann test

摘要

The deflectometry based on reverse-Hartmann-test configuration provides a feasible way for wavefront testing. Objects with complex surfaces place a high requirement on the wavefront testing accuracy, in which the systematic parameter is the key issue. In this paper, the effect of systematic parameters of the testing system such as the geometrical error and the approximation of systematic geometrical parameters are discussed in detail and a calibration method is proposed. Numerical simulation is carried out to demonstrate the feasibility of the proposed calibration method, for the transmitted wavefront with RMS 3.1220 urn, the testing optimization result of residual error with RMS value better than 20 nm is achieved.