Specular and diffuse x-ray scattering from tungsten/carbon multilayers having a high reflectivity at 10 keV

摘要

Abstract: X-ray scattering measurements at 10 keV from multilayers having a period of 24.8 Angstrom and consisting of 100 W/C bilayers are reported. Specular scans revealed first order reflectivities in the range 73.5% to 78.0% with bandpasses in the range of 1.5% to 1.7%. Total roughness (or interface grading) values deduced from fitting were in the range 2.5 to 3.0 angstrom for the last-to-grow surface of the W layers. Diffuse scattering measurements were made in a novel geometry that permitted investigation of in-plane momentum transfers up to 0.2 Angstrom$+$MIN@1$/. This is roughly an order of magnitude larger than is possible in conventional rocking scans. A power law dependence of the diffuse scattering after integration over a 'Brillioun zone' is found. The exponent of this power law, 1.75, when interpreted using a logarithmic correlation function leads to a value of 1.0 angstrom for the correlated roughness. !17