TOTAL INTERNAL REFLECTION ELLIPSOMETRY - A TOOL FOR IN-SITU CORROSION STUDIES

摘要

A new measurement technique combining ellipsometry and total internal reflection is presented. This technique is called total internal reflection ellipsometry and opens new possibilities for measurements of thickness and roughness changes on metal surfaces. Results from corrosion detection on thin copper films are presented. Also a schematic design of the instrument used in total internal reflection ellipsometry is included. The main advantage compared to normal ellipsometry is that measurements can be done in opaque ambients due to internal reflection.