Vacuum electrical breakdown characteristics of oxygen-free copper electrodes processed by precision machining

摘要

Vacuum breakdown characteristics of oxygen-free copper electrodes processed by precision machining were investigated by applying impulse voltage As a result, processed electrodes by precision machining showed higher conditioning effect than those of electrodes without the process. And the conditioning was achieved with less number of breakdowns. Accordingly the precision machining and the subsequent hydrogen annealing are effective in improving breakdown fields of the early stage of conditioning process.