CONVERSION OF OLD FABS/LABS – THE VIBRATION DESIGNPERSPECTIVE

摘要

Advanced technology facilities of yesterday are in many cases obsolete unless they go through a conversion process ofrnfacility and process upgrade commonly called "retooling". The facility upgrade may involve multidisciplinary activities inrnthe areas of architectural, structural, mechanical, and electrical. As the facility needs of current-generation technologies havernchanged dramatically, so too have the microvibration needs of these facilities.rnThis paper examines the history of microvibration needs of advanced technology facilities as manufacturing technologiesrnhave migrated from several microns to submicron and nanometer scales. The vibration upgrade of a facility conversionrnincludes structural retrofits and vibration source mitigation design. This paper examines structural retrofit options forrnincreasing vertical and horizontal stiffnesses, resulting in improved vibration performance. Source mitigation involvingrnsystematic design implementation on existing and new facility equipment is also discussed.