Metrological characterization of an ARS sensor based on an elliptical mirror system and a calibrated CMOS photo detector array

摘要

A major problem of in-situ surface characterization with angle-resolved light scatter (ARS) measurements is the fast and accurate acquisition of surface parameters with respect to industrial applications. The paper deals with design considerations and applications of an ARS sensor based on a calibrated CMOS photo detector array (CPDA) and an elliptical mirror system (EMS). In the first part of the paper the basic design approach of the ARS sensor system LARISSA will be presented. In the second part of the paper the characteristics of the CPDA and of the EMS will be discussed including considerations of design problems and solutions. In the third part of the paper experimental results from ARS measurements on PSL particles on Si wafers (particle diameters 5 μm and 10 μm) by using the CPDA will be considered in comparison with simulation results. Finally, the design progress will be summarized and the applicability of the ARS sensor will be discussed with respect to industrial applications. Future design steps for other specific applications will be outlined. This paper is a continuation of a previous paper.