On-chip dome-shape spiral micro-inductor for high-frequency applications

摘要

This work reports a new approach to fabricate spiral on-chip inductors with suspended dome-shape metal tracks. The new fabrication techniques are aimed at reduction of substrate losses by fabrication of spiral metal tracks on top of a sacrificial polymeric dome so that the inductor is suspended in the air when the dome is finally removed. In addition, the reduction of fringing capacitance between the spiral metal tracks is expected since the tracks sidewalls are not fully overlap to each other. Dome-shape spiral inductors made of copper were demonstrated. Currently, high-frequency characterizations of these inductors are under way.