首页> 外文会议>Conference on X-Ray Mirrors, Crystals, and Multilayers II; Jul 10-11, 2002; Seattle, Washington, USA >Kirkpatrick-Baez elliptical bendable mirrors at the Nanospectroscopy beamline: metrological results and x-rays performance
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Kirkpatrick-Baez elliptical bendable mirrors at the Nanospectroscopy beamline: metrological results and x-rays performance

机译:纳米光谱光束线上的Kirkpatrick-Baez椭圆形可弯曲反射镜:计量结果和X射线性能

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Two bendable elliptical cylinder mirrors arranged in a Kirkpatrick-Baez (KB) geometry are installed at the Nanospectroscopy beamline at ELETTRA for refocusing soft x-rays provided by an APPLE II type undulator. This achromatic focusing device delivers the beam to a micrometer-scale, high photon density spot, which is the source for a Spectroscopic Photoemission and Low Energy Electron Microscope (SPELEEM). A similar second pair of KB mirrors will refocus the monochromated light in a second experimental station for a different imaging microscope. These four mirrors, developed by S.E.S.O., are manufactured from Glidcop~(TM) in a U shaped design with 380mm length. They are electroless nickel plated for polishing and are bent into an elliptical shape applying two unequal end moments. They have been tested in the optical metrology laboratory of ELETTRA using an in-house modified version of the Long Trace Profiler (LTP): the surface slope variation as a function of the bender actuators has been measured to characterize the behavior of the bender mechanism and the accuracy of the elliptical profiles that can be achieved. Both metrological optical data and x-rays performances show the achievement of a microradian accuracy for the different profiles in which each mirror can be bent and the possibility to vary the focal distance by about 30-40% around the nominal value.
机译:将两个以Kirkpatrick-Baez(KB)几何形状排列的可弯曲椭圆柱面镜安装在ELETTRA的纳米光谱光束线上,以重新聚焦APPLE II型起伏器提供的软X射线。这种消色差聚焦装置将光束传送到微米级的高光子密度点,这是光谱光发射和低能电子显微镜(SPELEEM)的来源。类似的第二对KB反射镜将在另一个实验台中将单色光重新聚焦在另一台成像显微镜上。由S.E.S.O.开发的这四面镜子是由GlidcopTM以U形设计制造的,长度为380mm。它们经过化学镀镍处理以进行抛光,并弯曲成椭圆形,并施加两个不相等的端力矩。它们已在ELETTRA的光学计量实验室中使用内部改进版的Long Trace Profiler(LTP)进行了测试:已测量了表面弯曲度随弯曲执行器的变化,以表征弯曲机构的行为和可以达到的椭圆轮廓的精度。计量光学数据和X射线性能均显示了不同轮廓的微弧度精度,其中每个反射镜均可弯曲,并且焦距可以在标称值附近变化约30-40%。

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