Characterization of a confocal three-dimensional micro X-ray fluorescence facility based on polycapillary X-ray optics and Kirkpatrick-Baez mirrors

摘要

A new confocal three-dimensional micro X-ray fluorescence (3D micro-XRF) facility based on polycapillary X-ray optics in the detection channel and Kirkpatrick- Baez (KB) mirrors in the excitation channel is designed. The lateral resolution (l(x), l(y)) of this confocal three-dimensional micro-X-ray fluorescence facility is 76.3(1(x)) and 53.4(l(y)) mu m respectively, and its depth resolution d(z) is 77.1 mu m at theta = 90 degrees. A plant sample (twig of B. microphylla) and airborne particles are analyzed. (C) 2007 Elsevier B.V. All rights reserved.