Triant model applied to Tegal 90X etchers as an integrated process control module

摘要

This paper presents the implementation of Triant Model Ware on Tegal 90X series etchers to reduce wafer scrap on technologies associated with this tool set. Triant Model Ware becomes an integrated process control module of the Tegal etcher by means of a tool side computer interfaced to the Tegal system. Interface hardware provides the necessary communications interconnect for monitoring various sensor outputs associated with wafer processing values. Data acquisition hardware is implemented to provide real-time sensor information to support alarming conditions during signal monitoring. Models, associated with Triant Model Ware, monitor pertinent sensor conditions during wafer processing to identify possible process deviations attributable to scrap. Triant Model Ware examines process signatures on the Tegal etch system capturing potential equipment and process deviations reducing scrap on material processed on this tool set.