UV-Optical and microstructural properties of MgF_2- and LaF_3-coatings deposited by IBS and PVD processes

摘要

MgF_2 and LaF_3 are considered as materials of high potentiality for high quality coatings in the spectral range from 150 nm up to 250 nm. Results for these materials, which were investigated within an extended joint experiment of several European laboratories, are presented.