Protective coatings for Al metallisations obtained by plasma polymerization

摘要

Plasma polymerized hexamethyldisiloxane (PP-HMDSO) thin films have been obtained in a DC glow discharge from oxygen/HMDSO gas mixtures. Such films are successfully applied to the protection of Al metallisations on plastic substrates. The composition of the films (SiO_xC_y:H) amy be varied from organci (polymer-like) to inorganic (SiO_2-like) by varying the oxygen-to-monomer ratio in the precursor gas mixture. The structural and functional properties of the films are studied as a function of the plasma parameters.