Plasma Polymerization Deposited Transparent Protective Coating for Plastic Display Window

摘要

The technique of mid-frequency plasma polymerization was employed to deposit scratch-resistant and anti-fogging films on transparent polycarbonate substrates. The input monomer used for depositing scratch-resistant coatings was tetramethyldisiloxane (TMDSO). Variation of oxygen-to-TMDSO ratio study indicated that the hardest film was formed using equal amount of oxygen and TMDSO. The typical deposition rate was about 3 fim/hr. Typical operation pressure, TMDSO flow and oxygen flow were 2xl0-2 Torr, 30 seem and 30 seem, respectively. The deposited polysiloxane layer was characterized as a hard, highly transparent and durable against scratching and abrasion film. Further depositing a thin hydrophilic film on top of the polysiloxane layer significantly improved the surface wettability and therefore dramatically increased the anti-fogging capability. The monomer used for polymerization deposition of the anti-fogging film was vinyl acetate, and the typical flow for vinyl acetate monomer and oxygen were 15 seem and 10 seem, respectively.