Wafer-scale scientific CCDs at Fairchild Imaging

摘要

Fairchild Imaging has established a unique capability for high volume production of wafer-scale, scientific grade CCD (charge-coupled device) image sensors with active areas ranging from 6x6 cm, with 16 million pixels, to 8 x 8 cm devices with 85 million pixels. Large format back-illuminated CCDs are currently in volume production. This paper provides a detailed description of two recent products, and the technologies associated with their development.