Micro fabricated ZnSe Diffractive Optical Elements for CO_2 laser

摘要

We have developed a new design of advanced optics for processing high-power laser material. We introduce the concept of DOE (Diffiractive Optical Elements) for high power CO_2 lasers (λ =10.6μm). The superior functionality of DOE means that it could become the new standard in optics for next generation devices. Here we describe the design of our D~1OE technology using scalar theory and micro fabrication using photolithography and RIE (Reactive Ion Etching). We also present results of our ZnSe-DOE technology, mainly focusing on a novel spot-array generator.