首页> 外文会议>Conference on Microelectronics: Design, Technology, and Packaging; Dec 10-12, 2003; Perth, Australia >Determination of junction depth and related current phenomena using laser beam induced current
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Determination of junction depth and related current phenomena using laser beam induced current

机译:使用激光束感应电流确定结深和相关电流现象

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The characterisation of photodiode junction depth using laser beam induced current (LBIC) has long been ambigious, due in part to the limited understanding behind the relevant physics governing this phenomena, and more importantly, the signal behaviour for the various device geometries. In this work, the induced current behaviour arising from the individual junction components that form the device for different geometric conditions is examined in detail. In particular, at low temperatures, the overall LBIC signal dependence to junction depth could be attributed to current crowding through the dominance of two competing current mechanims which include a lateral current, flow, I_(lbic), and a transverse current flow, I_(ph). This study represents another step in the development towards a fully quantitative procedure for extracting junction depth and alternatively interpreting the current contributions arising from the individual junction components using LBIC.
机译:长期以来,使用激光束感应电流(LBIC)来表征光电二极管结深度一直是模棱两可的,这部分是由于对控制这种现象的相关物理学的理解有限,更重要的是,对于各种器件几何形状的信号行为。在这项工作中,详细检查了由形成不同几何条件的器件的各个结组件引起的感应电流行为。特别是在低温下,整个LBIC信号对结深度的依赖性可能归因于通过两个竞争性电流机制的优势而引起的电流拥挤,这两个竞争性电流机制包括横向电流I_(lbic)和横向电流I_( ph)。这项研究代表了朝着完全定量的程序发展的又一步,该程序用于提取结深并使用LBIC解释由各个结组件产生的当前贡献。

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