Application of sol-gel technique for the technology of planar waveguide sensors and the influence of waveguide parameters on the sensitivity of difference interferometer

摘要

The work discusses the application potentials of sol-gel technique in the technology of planar waveguide sensors. The capability to form refractive profiles with the use of various techniques applied in planar optics have been compared. The authors present the results of investigation studies involving the application of sol-gel technique of the oxide system SiO_2:TiO_2 for the formation of sensor layers, mask layers and waveguide layers. The influence of the thickness of waveguide layer and of its refractive index on the sensitivity of the meter measuring the refractive index changes and working in the difference interferometer system has been investigated.