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Spiral Planar-Waveguide Bragg Gratings

机译:螺旋平面波导布拉格光栅

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摘要

A photonic integrated circuit is designed containing a long grating with spiral geometry. Waveguide width and index modulation are studied as methods to form the grating structure. Both methods require an initial mask step for waveguide formation. In the case of width modulation the grating is formed in the same step as the waveguide, whereas a second mask step is required for index modulation. Thus width modulation removes the alignment tolerances associated with a two step process. The spiral geometry enables a long grating (~1 m) to be realized in a small area (1 cm~2). The ability to form the grating in such a small area enables the use of current lithography mask / projection equipment. Thus, the requirements for mechanical/optical precision in a customized long fiber Bragg grating fabrication system is transferred to the precision of commercial lithography mask fabrication and projection equipment.
机译:设计了一种光子集成电路,其中包含具有螺旋几何形状的长光栅。研究了波导宽度和折射率调制作为形成光栅结构的方法。两种方法都需要用于波导形成的初始掩模步骤。在宽度调制的情况下,光栅是在与波导相同的步骤中形成的,而折射率调制则需要第二个掩模步骤。因此,宽度调制消除了与两步过程相关的对准公差。螺旋形的几何形状可以在较小的面积(1 cm〜2)内实现长光栅(〜1 m)。在如此小的区域内形成光栅的能力使得能够使用当前的光刻掩模/投影设备。因此,在定制的长纤维布拉格光栅制造系统中对机械/光学精度的要求已转移到商业光刻掩模制造和投影设备的精度上。

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