KrF and XeF lasers pumped by a generator with inductive energy storage

摘要

Development of long-pulse discharge XeF- and KrF-lasers pumped by a generator with an inductive energy storage and semiconductor-opening switch is reported. It is shown that use of inductive storage element allows significantly improve discharge stability and expand laser pulse duration. Pulse duration (FWHM) of 60 ns was obtained both in Ne-Xe-NF_3 and Ne-Kr-F_2 gas mixtures. Laser specific output of 2,5 J/1 and intrinsic efficiency over 1% have been obtained for KrF-laser.