Development of hybrid multibeam module using polymer waveguidesfor laser scanning optics

摘要

A hybrid multibeam module using optical waveguides has been developed for laser scanning optics. The module is constructed using hybrid electrical/optical integration technology. Waveguides and laser diodes are assembled on a silicon substrate on which emitted beams from the laser diodes are coupled into waveguides. For the shorter 780 nm wavelength, which is used for this module, the precision of position control for laser diodes and waveguides must improve below 1 μm. The polyimide waveguides, which are suitable for mass production, are used. It is confirmed that the multibeam module consisting of a beam divergence angle from 10 degrees to 20 degrees, spatial beam interval with a 12-μm minimum, and a large number of the beams is possible.