首页> 外文会议>Conference on BioMEMS and Nanotechnology; 20071205-07; Canberra(AU) >Mechanisms of Formation of Nanostructures with Atomic Force Microcopy
【24h】

Mechanisms of Formation of Nanostructures with Atomic Force Microcopy

机译:原子力显微镜下纳米结构的形成机理

获取原文
获取原文并翻译 | 示例

摘要

The scanning probe microscopy-based (SPM) lithography techniques have presented significant challenges in fabricating nanostructures. Using this technique with assistance of pulse current, direct deposition or oxidation can be introduced on material surfaces. In present research, we use an atomic force microscope (AFM) to write a solid (gold) feature onto a substrate (silicon) in ambient environment. During the contact-sliding, the material on the gold (Au) tip transferred onto the surface of the single crystalline silicon (Si). This transfer takes place atomically as shown on a smoothly worn Au tip. This process is almost as simple as writing a line with a pencil. Dispersion of thermal energy inducted through friction is discussed in this presentation.
机译:基于扫描探针显微镜(SPM)的光刻技术在制造纳米结构方面提出了重大挑战。使用这种技术在脉冲电流的辅助下,可以在材料表面引入直接沉积或氧化。在当前的研究中,我们使用原子力显微镜(AFM)在环境中将固态(金)特征写入到基板(硅)上。在接触滑动过程中,金(Au)尖端上的材料转移到单晶硅(Si)的表面上。这种转移是原子发生的,如平滑磨损的金笔尖所示。这个过程几乎和用铅笔写一条线一样简单。在此演示文稿中讨论了通过摩擦引起的热能的分散。

著录项

相似文献

  • 外文文献
  • 中文文献
  • 专利
获取原文

客服邮箱:kefu@zhangqiaokeyan.com

京公网安备:11010802029741号 ICP备案号:京ICP备15016152号-6 六维联合信息科技 (北京) 有限公司©版权所有
  • 客服微信

  • 服务号