Investigation of processes of manufacturing hologram diffraction gratings based on As-S-Se layers

摘要

Results of investigation of processes providing formation of hologram diffraction gratings based on As_2S_3 layers are represented. Using the method of atomic force microscopy the groove profile shape is studied for these gratings in dependency on exposure values. Carried out are measurements of their diffraction efficiency dependencies and analysed is their relation to the relief shape of the grating surface.