Improvement of the position linearity in a comb-type one-dimensional position sensitive detector

摘要

In a conventional, strip-type one-dimensional (1-D) position sensitive detector (PSD) the sensitive area and the position resistance area are combined together, the contact structure of the device is handicapped, so its accuracy and linearity is affected adversely. The sensitive area and the position resistance area in a new, comb-type 1-D PSD are separated to become the comb teeth and the comb ridge area respectively, moreover the position resistance area is made very narrow, thus the doping uniformity of that area is greatly improved. On the other hand, its position resistance can be largely increased owing to its narrower shape, if doping level is kept the same, so the restriction that is imposed on the contact structure previously can be lifted. Our measurements made on a strip-type 1-D PSD and a comb type 1-D PSD confirmed this difference, and showed that the accuracy and linearity of the comb type 1-D PSD has been increased markedly, especially the RMS nonlinearity of the comb type 1-D PSD is reduced to 0.090 % from that of the strip-type 1-D PSD, 0.94 %.