Effect of Electron Microscope Magnification on the Determination of Particle Size and Shape by Image Analysis

摘要

To investigate the effect of magnification (M) on determination of particle size and shape by transmission electron microscopy (TEM) and image analysis. The calibration curve and its simulative equation of TEM magnification are obtained by measurement of a grating replica standard specimen at different magnifications. Based on the analysis of TEM images at a series of magnifications for a 350nm-sphere standard sample, It has been found that the two errors of its size measurement, caused by one pixel change of the pixel number per particle diameter (Np) and by one gray value change during thresholding, is smaller, and the shape of 'circle' particles are close to the standard one, while Np is larger than 35. It can be seen that the suitable TEM magnification is in inverse proportion to particle size and it can be calculated by given equation.