DESIGN AND ANALYSIS OF A MICRO-POSITIONING STAGE

摘要

The purpose of this research is trying to design a 6 degree-of-freedom micro-precision positioning stage with monolithic mechanism. It is hoped that this stage can reach 10 μm strokes along linear axis and with rotational angle no less than 50 urad. The dimension of this positioning stage should be less than 200 mm × 200 mm × 50 mm. By using flexure hinge and piezoelectric actuator, this stage can achieve nanometer resolution. From the experimental results, it is found that the stage can achieve a maximum displacement of 29.3 μm in X axis; 11.94 μm in Y axis; and 6.74 μm in Z axis. The stage can also achieve a maximum rotation of 405.41 μrad around Z axis; 57.18 urad around X axis; and 63.72 μrad around Y axis. With open loop control, we have shown that the minimum step for the stage is 110 nm in X-axis; 45 nm in Y axis; and 30 nm in Z-axis.